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ceramic for vacuum chuck
Product Detailed
Related Categories:Ceramics
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Ceramics for Air Diffuser
1, uniform pore size, good consistency
2, smooth surface, uniform
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Micro porous ceramic for vacuum chuck
Ceramic Vacuum Wafer Chuck Semiconductor/Electronics High accuracy complex surface shapes
Ceramic Vacuum Chucks are manufactured with high accuracy and complex surface shapes, which are used for holding wafers during various semiconductor processes.
Reduce the effect of particulate contaminationOffer ultra-clean purityMinimize wafer contactResist corrosion in aggressive chemical cleaningTypical applications include:
LithographyInspectionWafer cleaningNon-vacuum process chambers.
ceramic for vacuum chuck
